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Thermal reaction of SiC films with Mo, Re and Mo-Re alloy

Identifieur interne : 001076 ( Main/Exploration ); précédent : 001075; suivant : 001077

Thermal reaction of SiC films with Mo, Re and Mo-Re alloy

Auteurs : Jerome Roger [France] ; Fabienne Audubert [France] ; Yann Le Petitcorps [France]

Source :

RBID : Pascal:09-0250260

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English descriptors

Abstract

Solid-state reactions between SiC films and pure Mo or Re metal substrates on thermal annealing between 1373 and 1873 K for various durations have been investigated. The behaviour of Mo-47.5Re/SiC couple was also examined to establish the effect of the mix on stability. SiC coatings were deposited on metallic wires by hot filament rapid chemical vapour deposition from a gas mixture of tetramethylsilane (TMS) and hydrogen at 1373 K under normal pressure. The interface zones were characterized using optical microscopy. X-ray diffraction, and electron probe microanalysis. All analyses reveal that SiC reacts with substrates. The formation of a rhenium silicide was established on pure Re whereas a carbide and a silicon carbide containing molybdenum were formed on pure Mo. The diffusion kinetics were established from the thicknesses of reaction zones as a function of annealing durations. The outstanding fact of this work was the higher degree of reactivity observed on Mo-47.5Re alloy in comparison with pure Mo or Re as if there is a synergic effect. The apparent activation energy determined on pure Mo, pure Re and Mo-47.5Re substrates are equal to 64,99 and 74 kcal mol-1, respectively.


Affiliations:


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Le document en format XML

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<term>Activation energy</term>
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<term>Gas mixtures</term>
<term>Interfaces</term>
<term>Kinetics</term>
<term>Molybdenum alloys</term>
<term>Molybdenum carbide</term>
<term>Optical microscopy</term>
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<term>Silicides</term>
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<term>Thermal annealing</term>
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<term>Couche mince</term>
<term>Réaction état solide</term>
<term>Recuit thermique</term>
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<term>Dépôt chimique phase vapeur</term>
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<term>Interface</term>
<term>Microscopie optique</term>
<term>Diffraction RX</term>
<term>Analyse microsonde électronique</term>
<term>Rhénium</term>
<term>Carbure de molybdène</term>
<term>Diffusion(transport)</term>
<term>Cinétique</term>
<term>Carbure de silicium</term>
<term>Molybdène alliage</term>
<term>Fil métallique</term>
<term>Sulfure de thulium</term>
<term>Siliciure</term>
<term>Epaisseur</term>
<term>Energie activation</term>
<term>SiC</term>
<term>Substrat métal</term>
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<div type="abstract" xml:lang="en">Solid-state reactions between SiC films and pure Mo or Re metal substrates on thermal annealing between 1373 and 1873 K for various durations have been investigated. The behaviour of Mo-47.5Re/SiC couple was also examined to establish the effect of the mix on stability. SiC coatings were deposited on metallic wires by hot filament rapid chemical vapour deposition from a gas mixture of tetramethylsilane (TMS) and hydrogen at 1373 K under normal pressure. The interface zones were characterized using optical microscopy. X-ray diffraction, and electron probe microanalysis. All analyses reveal that SiC reacts with substrates. The formation of a rhenium silicide was established on pure Re whereas a carbide and a silicon carbide containing molybdenum were formed on pure Mo. The diffusion kinetics were established from the thicknesses of reaction zones as a function of annealing durations. The outstanding fact of this work was the higher degree of reactivity observed on Mo-47.5Re alloy in comparison with pure Mo or Re as if there is a synergic effect. The apparent activation energy determined on pure Mo, pure Re and Mo-47.5Re substrates are equal to 64,99 and 74 kcal mol
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